Nitrogen trifluoride
Nitrogen trifluoride (NF
3) is an inorganic, colorless, non-flammable, toxic gas with a slightly musty odor. It finds increasing use within the manufacturing of flat-panel displays, photovoltaics, LEDs and other microelectronics. Nitrogen trifluoride is also an extremely strong and long-lived greenhouse gas. Its atmospheric burden exceeded 2 parts per trillion during 2019 and has doubled every five years since the late 20th century.
| Names | |
|---|---|
| IUPAC name
Nitrogen trifluoride | |
| Other names
Nitrogen fluoride Trifluoramine Trifluorammonia | |
| Identifiers | |
3D model (JSmol) |
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| ChEBI | |
| ChemSpider | |
| ECHA InfoCard | 100.029.097 |
| EC Number |
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| 1551 | |
PubChem CID |
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| RTECS number |
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| UNII | |
| UN number | 2451 |
CompTox Dashboard (EPA) |
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| Properties | |
| NF3 | |
| Molar mass | 71.00 g/mol |
| Appearance | colorless gas |
| Odor | moldy |
| Density | 3.003 kg/m3 (1 atm, 15 °C) 1.885 g/cm3 (liquid at b.p.) |
| Melting point | −207.15 °C (−340.87 °F; 66.00 K) |
| Boiling point | −129.06 °C (−200.31 °F; 144.09 K) |
| 0.021 g/100 mL | |
| Vapor pressure | 44.0 atm(−38.5 °F or −39.2 °C or 234.0 K) |
Refractive index (nD) |
1.0004 |
| Structure | |
| trigonal pyramidal | |
| 0.234 D | |
| Thermochemistry | |
Heat capacity (C) |
53.26 J/(mol·K) |
Std molar entropy (S⦵298) |
260.3 J/(mol·K) |
Std enthalpy of formation (ΔfH⦵298) |
−31.4 kcal/mol −109 kJ/mol |
Gibbs free energy (ΔfG⦵) |
−84.4 kJ/mol |
| Hazards | |
| GHS labelling: | |
| H270, H280, H332 | |
| P220, P244, P260, P304+P340, P315, P370+P376, P403 | |
| NFPA 704 (fire diamond) | |
| Flash point | Non-flammable |
| Lethal dose or concentration (LD, LC): | |
LC50 (median concentration) |
2000 ppm (mouse, 4 h) 9600 ppm (dog, 1 h) 7500 ppm (monkey, 1 h) 6700 ppm (rat, 1 h) 7500 ppm (mouse, 1 h) |
| NIOSH (US health exposure limits): | |
PEL (Permissible) |
TWA 10 ppm (29 mg/m3) |
REL (Recommended) |
TWA 10 ppm (29 mg/m3) |
IDLH (Immediate danger) |
1000 ppm |
| Safety data sheet (SDS) | AirLiquide |
| Related compounds | |
Other anions |
nitrogen trichloride nitrogen tribromide nitrogen triiodide ammonia |
Other cations |
phosphorus trifluoride arsenic trifluoride antimony trifluoride bismuth trifluoride |
Related binary fluoro-azanes |
tetrafluorohydrazine |
Related compounds |
dinitrogen difluoride |
Except where otherwise noted, data are given for materials in their standard state (at 25 °C [77 °F], 100 kPa).
Infobox references | |
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