How to add modules in treesitter neovim?

Question

I'm trying to install treesitter nvim.I do everything according to the documentation, but nothing works. google does not provide any useful information on these errors. My packer.lua file:

vim.cmd [[packadd packer.nvim]]

return require('packer').startup(function(use)
  -- Packer can manage itself
  use 'wbthomason/packer.nvim'

  use {
          'nvim-telescope/telescope.nvim', tag = '0.1.1',
          requires = { {'nvim-lua/plenary.nvim'} }
  }

  use({ 'rose-pine/neovim', as = 'rose-pine' })

  vim.cmd('colorscheme rose-pine')

  use {
          'nvim-treesitter/nvim-treesitter',
          run = function()
                  local ts_update = require('nvim-treesitter.install').update({ with_sync = true })
                  ts_update()
          end,
  }

  use("nvim-treesitter/playground")
end)

My after/plugin/treesitter.lua file:

require'nvim-treesitter.configs'.setup {
  -- A list of parser names, or "all"
  ensure_installed = { "vimdoc", "javascript", "typescript", "vim", "query", "c", "lua", "rust" },

  -- Install parsers synchronously (only applied to `ensure_installed`)
  sync_install = false,

  -- Automatically install missing parsers when entering buffer
  -- Recommendation: set to false if you don't have `tree-sitter` CLI installed locally
  auto_install = true,

  highlight = {
    -- `false` will disable the whole extension
    enable = true,

    -- Setting this to true will run `:h syntax` and tree-sitter at the same time.
    -- Set this to `true` if you depend on 'syntax' being enabled (like for indentation).
    -- Using this option may slow down your editor, and you may see some duplicate highlights.
    -- Instead of true it can also be a list of languages
    additional_vim_regex_highlighting = false,
  },
}

When i typed :so in treesitter.lua I see errors:

nvim-treesitter[query]: Failed to execute the following command:
{
  cmd = "mv",
  opts = {
    args = { "-f", "tree-sitter-query-tmp/tree-sitter-query-3a9808b22742d5bd906ef5d1a562f2f1ae57406d", "tree-sitter-query" },
    cwd = "/home/kirill/.local/share/nvim",
    stdio = {
      [2] = <userdata 1>,
      [3] = <userdata 2>
    }
  }
}
mv: cannot stat 'tree-sitter-query-tmp/tree-sitter-query-3a9808b22742d5bd906ef5d1a562f2f1ae57406d': No such file or directory
Press ENTER or type command to continue
[nvim-treesitter] [1/8, failed: 1] Creating temporary directory
Press ENTER or type command to continue
[nvim-treesitter] [1/8, failed: 1] Creating temporary directory
Press ENTER or type command to continue
[nvim-treesitter] [1/8, failed: 1] Creating temporary directory
Press ENTER or type command to continue
[nvim-treesitter] [1/8, failed: 1] Creating temporary directory
Press ENTER or type command to continue
[nvim-treesitter] [1/8, failed: 1] Creating temporary directory
Press ENTER or type command to continue
[nvim-treesitter] [1/8, failed: 1] Creating temporary directory
Press ENTER or type command to continue
[nvim-treesitter] [1/8, failed: 1] Creating temporary directory
Press ENTER or type command to continue
[nvim-treesitter] [1/8, failed: 1] Extracting tree-sitter-typescript...
Press ENTER or type command to continue
[nvim-treesitter] [1/8, failed: 1] Extracting tree-sitter-lua...
Press ENTER or type command to continue
[nvim-treesitter] [1/8, failed: 1] Extracting tree-sitter-c...
Press ENTER or type command to continue
[nvim-treesitter] [1/8, failed: 1] Extracting tree-sitter-vimdoc...
Press ENTER or type command to continue
[nvim-treesitter] [1/8, failed: 1] Extracting tree-sitter-vim...
Press ENTER or type command to continue
[nvim-treesitter] [1/8, failed: 1] Extracting tree-sitter-javascript...
Press ENTER or type command to continue
[nvim-treesitter] [1/8, failed: 1] Extracting tree-sitter-rust...
nvim-treesitter[typescript]: Failed to execute the following command:
{
  cmd = "mv",
  opts = {
    args = { "-f", "tree-sitter-typescript-tmp/tree-sitter-typescript-286e90c32060032225f636a573d0e999f7766c97", "tree-sitter-typescript" },
    cwd = "/home/kirill/.local/share/nvim",
    stdio = {
      [2] = <userdata 1>,
      [3] = <userdata 2>
    }
  }
}
mv: cannot stat 'tree-sitter-typescript-tmp/tree-sitter-typescript-286e90c32060032225f636a573d0e999f7766c97': No such file or directory
....

I can't find solution. My nvim version:

NVIM v0.9.0
Build type: Release
LuaJIT 2.1.0-beta3

   system vimrc file: "$VIM/sysinit.vim"
  fall-back for $VIM: "/usr/share/nvim"

Run :checkhealth for more info

:checkhealth treesitter

==============================================================================
vim.treesitter: require("vim.treesitter.health").check()

- Nvim runtime ABI version: 14

:checkhealth nvim-treesitter

nvim-treesitter: require("nvim-treesitter.health").check()

Installation
- OK tree-sitter found 0.20.8 (parser generator, only needed for :TSInstallFromGrammar)
- OK node found v19.8.1 (only needed for :TSInstallFromGrammar)
- OK git executable found.
- OK cc executable found. Selected from { vim.NIL, "cc", "gcc", "clang", "cl", "zig" }
  Version: cc (GCC) 12.2.1 20230201
- OK Neovim was compiled with tree-sitter runtime ABI version 14 (required >=13). Parsers must be compatible with runtime ABI.

OS Info:
{
  machine = "x86_64",
  release = "6.1.25-1-MANJARO",
  sysname = "Linux",
  version = "#1 SMP PREEMPT_DYNAMIC Thu Apr 20 13:48:36 UTC 2023"
}

Parser/Features         H L F I J

  Legend: H[ighlight], L[ocals], F[olds], I[ndents], In[j]ections
         +) multiple parsers found, only one will be used
         x) errors found in the query, try to run :TSUpdate {lang}