Yes, you can use Template Haskell. The are a couple of approaches to using it.
One approach is to use quasiquotation to embed (parts of) the text of the specification in a quasiquotation within a source file. To implement it, you need to write a parser of the machine specification that outputs Haskell AST. This might be useful if the specification is relatively static, it makes sense to have subsets of the specification, or you want to manually map parts of the specification to different modules. This may also be useful, in addition to a different approach perhaps, to provide tools for users of the library to express things in terms of the specification.
Another approach is to execute IO in a normal Template Haskell splice. This would allow you to read the specification from a file (see addDependentFile too in this case), the network (don't do this), or to execute an arbitrary program to produce the Haskell AST needed. This might be more useful if the specification changes more often, or you want to keep a strict separation between the specification and code.
If it's much easier to produce Haskell source than Haskell AST, you can use a library like haskell-src-meta which will parse a string into Template Haskell AST.