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I understand older Procmon and its predecessors (filemon, regmon etc) used virtual drivers to hook the kernel. However, Patchguard prevents SSDT hooking etc on 64-bit Vista+.

It is my understanding that Procmon now uses a minifilter driver for File IO monitoring and ETW for networking monitoring. However, I am no clear on how it monitors registry access and process/image/thread events? Does it also use ETW for these?

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There are bunch of callbacks for monitoring support in kernel (since xp):

on xp was some limitation, but since vista they fully functional. No need to patch any internal tables for any monitoring activity.