Tungsten hexafluoride
Tungsten(VI) fluoride, also known as tungsten hexafluoride, is an inorganic compound with the formula WF6. It is a toxic, corrosive, colorless gas, with a density of about 13 kg/m3 (22 lb/cu yd) (roughly 11 times heavier than air). It is one of the densest known gases under standard conditions. WF6 is commonly used by the semiconductor industry to form tungsten films, through the process of chemical vapor deposition. This layer is used in a low-resistivity metallic "interconnect". It is one of seventeen known binary hexafluorides.
Solid WF6 melting into liquid WF6 | |||
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| Names | |||
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| IUPAC names
Tungsten hexafluoride Tungsten(VI) fluoride | |||
| Identifiers | |||
3D model (JSmol) |
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| ECHA InfoCard | 100.029.117 | ||
| EC Number |
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PubChem CID |
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| UNII | |||
| UN number | 2196 | ||
CompTox Dashboard (EPA) |
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| Properties | |||
| WF6 | |||
| Molar mass | 297.830 g/mol | ||
| Appearance | Colorless gas | ||
| Density | 12.4 g/L (gas) 4.56 g/cm3 (−9 °C, solid) | ||
| Melting point | 2.3 °C (36.1 °F; 275.4 K) | ||
| Boiling point | 17.1 °C (62.8 °F; 290.2 K) | ||
| Hydrolyzes | |||
| −40.0·10−6 cm3/mol | |||
| Structure | |||
| Octahedral | |||
| zero | |||
| Hazards | |||
| Occupational safety and health (OHS/OSH): | |||
Main hazards |
Toxic, corrosive; gives HF on contact with water | ||
| GHS labelling: | |||
| Danger | |||
| H280, H301+H311, H314, H330 | |||
| P260, P264, P264+P265, P270, P271, P280, P284, P301+P316, P301+P330+P331, P302+P352, P302+P361+P354, P304+P340, P305+P354+P338, P316, P317, P320, P321, P330, P361+P364, P363, P403+P233, P405, P410+P403, P501 | |||
| Flash point | Non-flammable | ||
| Related compounds | |||
Other anions |
Tungsten hexachloride Tungsten hexabromide | ||
Other cations |
Chromium(VI) fluoride Molybdenum(VI) fluoride | ||
Related compounds |
Tungsten(IV) fluoride Tungsten(V) fluoride | ||
Except where otherwise noted, data are given for materials in their standard state (at 25 °C [77 °F], 100 kPa).
Infobox references | |||
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