Silicon oxynitride
Silicon oxynitride is a ceramic material with the chemical formula SiOxNy. While in amorphous forms its composition can continuously vary between SiO2 (silica) and Si3N4 (silicon nitride), the only known intermediate crystalline phase is Si2N2O. It is found in nature as the rare mineral sinoite in some meteorites and can be synthesized in the laboratory.
| Names | |
|---|---|
| Other names
Silicon nitride oxide, dinitride disilicon oxide | |
| Identifiers | |
| |
| ECHA InfoCard | 100.031.617 |
| EC Number |
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| Properties | |
| N2OSi2 | |
| Molar mass | 100.183 g·mol−1 |
| Appearance | Colorless crystals |
| Density | 2.81 g·cm−3 |
| Structure | |
| Orthorhombic | |
| Cmc21 No 36, Pearson symbol oS20 | |
a = 0.48553 nm, b = 0.52194 nm, c = 0.52194 nm, Z = 4 | |
Except where otherwise noted, data are given for materials in their standard state (at 25 °C [77 °F], 100 kPa).
Infobox references | |
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