Chlorine trifluoride

Chlorine trifluoride is an interhalogen compound with the formula ClF3. This colorless, poisonous, corrosive, and extremely reactive gas condenses to a pale-greenish yellow liquid, the form in which it is most often sold (pressurized at room temperature). Despite being famous for its extreme oxidation properties and igniting many things, chlorine trifluoride is not combustible itself. The compound is primarily of interest in plasmaless cleaning and etching operations in the semiconductor industry, in nuclear reactor fuel processing, historically as a component in rocket fuels, and various other industrial operations owing to its corrosive nature.

Chlorine trifluoride
Names
Systematic IUPAC name
Trifluoro-λ3-chlorane (substitutive)
Other names
Chlorotrifluoride
Identifiers
3D model (JSmol)
ChEBI
ChemSpider
ECHA InfoCard 100.029.301
EC Number
  • 232-230-4
1439
MeSH chlorine+trifluoride
RTECS number
  • FO2800000
UNII
UN number 1749
  • InChI=1S/ClF3/c2-1(3)4 Y
    Key: JOHWNGGYGAVMGU-UHFFFAOYSA-N Y
  • InChI=1/ClF3/c2-1(3)4
    Key: JOHWNGGYGAVMGU-UHFFFAOYAB
  • F[Cl](F)F
  • [F-].[F-].F[Cl++]
Properties
ClF3
Molar mass 92.45 g·mol−1
Appearance Colorless gas or greenish-yellow liquid
Odor Sweet, pungent, irritating, suffocating
Density 3.779 g/L
Melting point −76.34 °C (−105.41 °F; 196.81 K)
Boiling point 11.75 °C (53.15 °F; 284.90 K) (decomposes at 180 °C (356 °F; 453 K))
Reacts with water
Solubility Soluble in carbon tetrachloride but explosive in high concentrations. Reacts with hydrogen-containing compounds e.g. hydrogen, methane, benzene, ether, ammonia.
Vapor pressure 175 kPa
−26.5×10−6 cm3/mol
Viscosity 91.82 μPa s
Structure
T-shaped molecular geometry
Thermochemistry
63.9 J K−1 mol−1
281.6 J K−1 mol−1
−163.2 kJ mol−1
−123.0 kJ mol−1
Hazards
Occupational safety and health (OHS/OSH):
Main hazards
Very toxic, very corrosive, powerful oxidizer, violent hydrolysis
GHS labelling:
Danger
NFPA 704 (fire diamond)
Flash point noncombustible
Lethal dose or concentration (LD, LC):
95 ppm (rat, 4 hr)
178 ppm (mouse, 1 hr)
230 ppm (monkey, 1 hr)
299 ppm (rat, 1 hr)
NIOSH (US health exposure limits):
PEL (Permissible)
C 0.1 ppm (0.4 mg/m3)
REL (Recommended)
C 0.1 ppm (0.4 mg/m3)
IDLH (Immediate danger)
20 ppm
Safety data sheet (SDS)
Related compounds
Related compounds
Chlorine pentafluoride

Chlorine monofluoride
Bromine trifluoride
Iodine trifluoride

Except where otherwise noted, data are given for materials in their standard state (at 25 °C [77 °F], 100 kPa).
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Infobox references
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